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The E-beam Lab houses an electron microprobe with five wavelength-dispersive spectrometers (WDS) and a large-area energy-dispersive spectrometer (EDS) on our low-vacuum SEM for non-destructive in-situ elemental characterization. Both can be used to qualitatively or quantitatively map elemental concentration variations (>100s of ppm) from the micron to the cm scale, as well as ~1 cubic micron focused beam analyses (>10 ppm).
Services Offered
- Electron beam lithography for nanoscale fabrication
- Patterning for semiconductor and materials science research
- Access to precision e-beam instrumentation
- Collaboration on micro- and nanoscale device manufacturing
- Technical consulting and training for e-beam processes
Brief Description
Electron beam lithography, Nanofabrication, Patterning services, Device prototyping