Texas Nanofabrication Facility
As part of the Texas Nanofabrication Facility (TNF), the Microelectronics Research Center (MRC) Nanofab at The University of Texas at Austin facilitates education, research and development in electronic, photonic, optoelectronic, spintronic, and micro-electromechanical (MEMS) materials, devices, and systems for a variety of applications including digital, neuromorphic and quantum computing, high-speed communications, displays, sensors, and power applications.
A 10-year member of the NSF National Nanotechnology Coordinated Infrastructure (NNCI), the MRC features 12,000 ft2 of shared-use class 100 and class 1000 cleanroom space equipped for crystal growth and device processing with a comprehensive set of advanced nanofabrication instruments.
Technical Capabilities
Empowering multi-disciplinary research with comprehensive nanofabrication infrastructure.
Cleanroom & Materials
12,000 sq. ft. of class 100/1000 cleanroom for Si, III–V, and soft materials.
Nanofabrication & Lithography
Sub-20 nm e-beam lithography on up to 8-inch wafers.
Thin-Film Deposition
Metals, dielectrics, ALD, LPCVD, and rapid thermal processing.
Etch & Surface Engineering
ICP/RIE, deep silicon etch, CMP, and wet processing.
Metrology & Characterization
AFM, SEM/TEM, XRD, ellipsometry, and electrical evaluation.