Safety

Before entering the cleanroom, all potential users must contact the Safety Coordinator to schedule mandatory Site-Specific Hazard Communication and Cleanroom Procedure & Policy training.

In case of an emergency, immediately call 911. Emergencies include situations requiring urgent assistance, such as fires, hazardous material incidents, medical emergencies, or suspicious activity. Your safety is our priority—report any concerns without hesitation.

 

MRC Safety & Cleanroom Procedures

Facility Alarms & Evacuation
  • In the event of a fire or gas alarm strobes and horns will activate.
  • If possible in a matter of seconds, turn off or place equipment that could become hazardous if unattended in a safe state.
  • Evacuate the building immediately for fire and gas alarms. Do not take time to badge out nor remove cleanroom garment until you have evacuated the building.
  • Evacuate the building immediately for power outages unless there is a storm outside, then assemble in the lobby.
  • If possible turn off equipment that could become hazardous if re-energized while unattended.
  • Evacuate and assemble at the Muster Point (emergency assembly area) across the street from the front (East side) of the building. Report to the Cleanroom Safety Contact if you were inside of the cleanroom so you are accounted.
  • Do not reenter the building under any situation until the all clear is given.
  • If you have any knowledge of the incident, please inform the nearest Emergency Response Team (ERT) member.
Personal Protective Equipment

Safety Glasses

Safety glasses should be worn in the following areas:

  • The cleanroom (at all times)
  • The machine shop
  • The test labs when working with chemicals, glass, mechanics or blow guns
  • Anywhere you are using a drill, saw, router, etc.
  • At all dewar filling stations

Gloves

  • Gloves are to be worn in the Cleanroom at all times.
  • Gloves available at the interior entrance to the cleanroom are to minimize particles in the cleanroom, they give you no protection against chemicals.
  • A combination of the above-mentioned gloves under a yellow Trionic® chemical glove will provide the necessary protection. Trionic® gloves are available through out the cleanroom and in the new garment area.
  • For glove compatibility with newly introduced chemicals, contact the Facilities Coordinator prior to chemical use.
  • Always wear chemical gloves, chemical apron, face shield, & safety glasses when working with chemicals
Chemicals, Materials Purchasing and Handling

Puchasing: All New & Free Chemical Samples

A Safety Data Sheets (SDS formerly MSDS) must be submitted to the Lab Safety Coordinator and Process Engineer for evaluation prior to any new materials being brought in to the Cleanroom and other Core Facility Shared Laboratories.

Chemical Handling

  • Read the SDS prior to using any chemical
  • Be sure to thoroughly rinse your hands prior to touching anything outside the wet hoods. Example: Damage to the face shields and air phones
  • Don’t set the chemical bottles on the decks of the hoods or on the floor. The bottoms of the bottles may not be clean and you will contaminate the hood (and your process)
  • Do not transport chemicals yourself off site or onto site. Contact Lab Safety Coordinator for instructions
  • Never add water to Acids. Always slowly add acid to water. Understand reaction of mixing chemicals.
  • DO NOT USE ACIDS IN THE STAINLESS STEEL HOODS

Chemical Storage

  • Chemicals are to be stored by their hazard class (i.e., Flammable, Corrosive, Oxidizer).
  • Storage cabinets are located throughout the cleanroom and are labeled as to their appropriate contents.
Safety Data Sheets

Safety Data Sheets (SDS formerly MSDS) are extremely important in the safe handling of hazardous substances. The University of Texas Environmental Health & Safety office recommends these SDS Databases.

Waste Disposal

All unanswered questions concerning waste disposal should be directed to the Facilities Coordinator.

Liquid Waste

  • All users are responsible for the proper management of chemicals throughout their entire lifecycle—from acquisition and storage to usage and final disposal.
  • ONLY acids may be disposed of down the drains located in the hoods with the use of the aspirator.
  • Organic solvents (i.e., Isopropyl Alcohol , Methanol, & Acetone) must be collected in the waste bottles marked “Waste” and identified to contain Isopropyl.

Alcohol , Methanol, & Acetone

Developers must also be collected and placed in the waste bottles marked “Waste” and identified to contain Developer.

When using photoresist in the clean room always place waste wipes lining spinners or contaminated with photoresist in the provided bags and place them in the red flammable trash cans.

All hazardous waste is documented, tagged, and picked up by the Universities Office of Environmental Health & If we fill these cans with uncontaminated trash we unnecessarily increase our workload and disposal costs.

Solid Waste

  • WHITE-Trashcans is for normal trash (i.e. cleanroom paper, broken glove, or non contaminated wipe.
  • RED-Trashcan is for debris contaminated with solvents (i.e. wipes and gloves).
  • YELLOW- Trashcan is for trash contaminated with acids (i.e. wipes and gloves).
  • The trashcans are all clearly labeled on the lid.
  • Do not fill the Red and Yellow trashcans with uncontaminated trash. You will unnecessarily increase our workload and disposal costs.
  • Clean up your mess as soon as you make it. Every lab user is responsible for the upkeep of the cleanroom. We have a Cleanroom Attendant to clean the floors and empty the trashcans but this person is not responsible for cleaning up the hoods, tables, etc.
  • Always leave the area in a clean state. This includes proper disposal of used chemicals.
  • All sharps (pipettes, & razor blades) are to be placed into the red sharps containers.
  • Broken wafers are to be placed into the blue containers marked Wafer Waste
  • Empty Acid bottles must be rinsed at to the hood located in aisle 1.006 prior to disposal into the trashcan next to the hood.
  • Empty organic solvent and developer bottles must be disposed of in the trashcans labeled “Empty Bottles Only” or in the trashcan next to the hood located in aisle 1.006

Chemical Exposure or Suspected Chemical Exposure

Steps to Follow in Case of Chemical Exposure
  1. Flush the Affected Area:
    • Immediately rinse the exposed area with water for 15 minutes (no exceptions).
    • For large exposures, use an emergency shower (located throughout the cleanroom).
  2. Remove Contaminated Items:
    • Take off any jewelry or contaminated clothing immediately.
  3. Alert Others and Call for Help:
    • Call out to someone in the cleanroom to notify them of the incident.
    • Have someone dial 911 and then contact the Emergency Response Team (ERT).
  4. Assist Emergency Responders:
    • Ensure someone meets the responders at the lobby entrance of building to guide them to the incident.
  5. For Large Exposures:
    • If the affected area is as large as or larger than the palm of your hand, dial 9-911 for an ambulance.
    • Provide details about the chemical involved.
  6. Precautions When Assisting Others:
    • Avoid direct contact with the exposed person or rinse water.
    • Wear appropriate chemical gloves to protect yourself.

Important Notes:

  • Report All Exposures: Notify staff immediately of any chemical exposure or suspected exposure.
  • Wear Proper Protective Equipment: Always use chemical gloves, safety glasses, a chemical apron, and a face shield to prevent accidents.
Hydrofluoric Acid Exposure & Treatment Information
  • Even a small HF exposure can be dangerous or life threatening.
  • Possible first signs of an exposure: a.) Redness of the skin b.) Itching or slight burning of the skin a.) pain under the finger nails if exposed d.) White to clear blistering of the exposed skin
  • If you suspect an exposure immediately remove any jewelry or contaminated clothing and quickly begin to flush the exposed area with water.
  • Large exposure will require the use of an emergency shower. Showers are located through out the cleanroom. Flush with water for 5 minutes. (This must be for 5 minutes). Call out to someone in the cleanroom and let them know you need help. Have someone dial: 911 Also notify staff, and if after hours, the Emergency Response Team (ERT) who will immediately respond to the building. Someone will need to meet the responders in the lobby entrance to building #160 so as to guide them to the incident. If the exposure covers an area as large or larger than the palm of your hand also dial 9-911 for an ambulance. Explain which chemical is involved and have the SDS (formerly MSDS) in hand. If assisting someone be sure not to touch the person or expose yourself to the rinse water, wear chemical gloves. If the incident is minor and you wish to question the ERT, call 9-606-3180 and at the tone leave the phone number you are calling from and a responder will contact you immediately. After flushing with water for 5 minuets apply Calcium Gluconate Gel to affected area and continue to apply until a responder arrives. Calcium Gluconate Gel is located at the South end of the cleanroom in a First Aid box near the phone.
  • All chemical exposures or suspected chemical exposures must be reported immediately to the staff.
  • After hours you must use the buddy system (Another knowledgeable user present to assist you in an emergency) when working with dangerous materials. This is especially important with the use of liquid chemicals after hours.
Eye Washes
  • Eyewashes are located through out the Cleanroom and Lite Labs.
  • When using an eyewash, depress eye wash handle, physically hold your eye open with your fingers and place your eye in the water stream. Allow several minutes for flushing to occur.
Data Sheet

Trionic Triple Polymer Glove

E-194 trionic triple-polymer blend gloves Offer superior performance in many aggressive chemicals used in wafer fabrication and other applications using acids and chemical mixtures. E194

Specification (ALL Size):

  • Length: 14” (35.6 cm)
  • Gauge: 0.020”(0.51 cm)
  • Color: Unpigmented
  • Cuff Design: Flat
  • Grip: “Z” Pattern
  • Material: Nitrile, Neoprene, Natural Rubber blend
  • E194 style pair packaged in heat sealed level 100 poly bag 12 pari packaged in twist tied clean, plain poly bag. Minimal printing on inside packaging for reduced contamination.
Pregnancy

Users that believe themselves to be pregnant please contact the Facilities Manager as soon as possible. The user is rarely restricted but the issue needs to be discussed.

MRC Cleanroom User Information

Liquid Nitrogen Filling Stations
  • There are two filling stations at the MRC facility. One is in the main corridor of the cleanroom and the other is at loading dock F room 1.010.
  • Always wear protective equipment when filling dewars (i.e. thermal gloves & face shield).
  • When you are filling a dewar do not leave it unattended. If you have to leave the area, turn the fill valve OFF. If you allow dewars to overflow it will damage the floors.
Nitrogen Gas Use
  • Please do not waste nitrogen gas.
  • Use nitrogen gas for cleaning wafer at process bench, for creating inert atmospheres in so designed container, or for use with solenoids.
Periodic Chemical Inventory Review & Disposal
  • Be sure to go through your storage areas (cleanroom and test labs) to check for expired date codes. If you have expired chemicals, coordinate disposal with the Facilities Manager.
  • Don’t let the cleanroom cabinets and hoods become a home for old chemicals or empty containers. This also applies to the test labs.
  • The Cleanroom manager can help with periodic inspections of bays or test labs.
Cross Contamination
  • Beware of cross contamination.
  • Beakers, tweezers, boats, cassettes, quartzware etc. are not to be moved from a tool at which it is located.
  • Each labelled labware should not be moved to another by for which it is not assigned.
  • Each tool is identified by a posted flier, listing general operating procedures and material compatible and incompatible of the tool.
  • If you have any questions concerning the use of a materials at a tool, contact the MRC Staff.
  • Example - Boat and boat holder from the furnace are labeled (C41-C44 and C51-C54 for MRL). Each boat and boat holder is assigned to a dedicated furnace. Do not swap boat and boat holder for another furnace.
  • Example - "Si etch" tweezer should be used only in the Si Photoresist etch hood. (H14, H15)

Example - Wafer holder "Photo" should stay in the Si Photo bay. Example - SC1/SC2 quartz beaker should stay in the gate oxide wet bench (C11).

Labeling
  • Any items or containers left out must be labeled with the container contents, users UT EID/name and date.
  • All containers, flasks and bottles without this mandatory information will be discarded. Users will receive a citation for incidence.
Equipment & Parts Entry
  • All equipment and parts entering the cleanroom must be cleaned prior to their entry into the cleanroom.
  • For larger parts and containers, the equipment and parts entry cleaning station #1 is located in room 1.010 dock F.
  • Use a lint free wipe and the appropriate solvent (isopropyl alcohol, methanol, acetone, or DI water) to clean the equipment.
  • Put all trash in the appropriate containers (i.e. red trash can).
  • Enter equipment and parts entry room with access card and place item on the table.
  • Exit and enter the main cleanroom entrance and access the equipment and parts entry room (1.702) and clean the item again. The item is now ready to enter the main body of the cleanroom.
  • Do not use the equipment and parts entry room for a storage area.
  • Clean the entry room when you are finished cleaning your parts.
  • No cardboard may enter the parts entry room or cleanroom.
Cleanroom Garments
  • Cleanroom garments are located in the cleanroom room 1.700C.
  • Use the established procedures as describe in the site specific Hazard Communication training video for wearing and storing garments.
  • You must put a nametag on your garment.
  • A tag will be furnished upon completion of Site Specific Hazardous Communication / Cleanroom Procedure & Policy training.
  • Wear garments for ~40 hours or until soiled before changing.
  • Do NOT take the garments home for any reason.
DI Water Usage
  • Our water usage is very high. We must conserve DI water whenever possible.
  • Do not rinse longer then five minutes.
  • Do not walk off for the faucet unless it is off.
New Equipment Installations

All equipment installations must be reviewed and approved prior to purchase or installation. This is necessary to make sure that all utility, safety, and operational issues have been addressed.

Communication
  • Report any safety hazards, broken equipment, water leaks, etc., immediately.
  • Never assume that someone has already reported the problem.
  • Monitor your e-mail for any information regarding equipment shut downs and utilities outages.
  • Monitor white board located at the entrance of the cleanroom for information concerning the cleanroom and its tools or emergency instructions.
  • For any problems (i.e., equipment malfunctions/breakdowns, office repairs etc…) submit them to mertech@mer.utexas.edu.

Key Resources

Building Emergency Plan (PDF)
Lab Safety Manual at UT Austin

Emergency Contacts

For fire emergency, medical emergency or hazardous material accident, call 911.

Emergency Response Team:

  • Safety Coordinator: 512-229-7622
  • Report Facility-related Emergencies:
    512-471-2020 (24-hour hotline)
  • Facilities Manager: 512-229-7622