Research

The Microelectronics Research Center concentrates research in the following major areas:

  • New device and integrated circuit structures, including advanced component development and process modeling for modern electronic, optoelectronic, and quantum systems
  • Studies of electron transport and quantum properties of small geometry devices and the physics of scaled devices
  • Device processing including diffusion, lithography, rapid thermal processing, plasma etching, remote plasma, and thermal chemical vapor deposition of silicon and related film
  • Advanced crystal growth of compound semiconductor materials, including III-V multiple heterojunction structures, employing MBE and MOCVD
  • New device structures for optoelectronic and photonic applications, and for microwave and millimeter-wave devices
  • Materials and devices to push the bounds of signal processing, sensing, and computing, such as atomically-small computing blocks, microelectromechanical systems (MEMS), quantum computing, hardware-aware neural networks and deep learning, energy-efficient intelligence, neuromorphic computing, photonics, spintronics, and ferroelectrics
  • New approaches to device packaging and interconnects, including optical interconnects

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MRC Faculty Director
Associate Professor, Dept. of Electrical and Computer Engineering


Administrative Manager

Faculty


Deji Akinwande
Professor, Electrical and Computer Engineering

Sanjay Banerjee
Professor, Electrical and Computer Engineering

Seth Bank
Professor, Electrical and Computer Engineering

David Burghoff
Assistant Professor, Electrical and Computer Engineering

Chin-Hao Chang
Professor, Mechanical Engineering

Ray Chen
Professor, Electrical and Computer Engineering

Michael Cullinan
Associate Professor, Mechanical Engineering

Ananth Dodabalapur
Professor, Electrical and Computer Engineering

Linran Fan
Assistant Professor, Electrical and Computer Engineering

Cheng Guo
Assistant Professor, Electrical and Computer Engineering

Neal Hall
Associate Professor, Electrical and Computer Engineering

Alex Q. Huang
Professor, Electrical and Computer Engineering

Jean Anne Incorvia
Associate Professor, Electrical and Computer Engineering

Jaydeep Kulkarni
Associate Professor, Electrical and Computer Engineering

Xiuling Li
Professor, Electrical and Computer Engineering

Ruochen Lu
Assistant Professor, Electrical and Computer Engineering

Frank Register
Professor, Electrical and Computer Engineering

Shyam Shankar
Assistant Professor, Electrical and Computer Engineering

Li Shi
Professor, Mechanical Engineering

S.V. Sreenivasan
Professor, Mechanical Engineering

Ben Streetman
Founding Director, Professor Emeritus, Electrical and Computer Engineering

Emanuel Tutuc
Professor, Electrical and Computer Engineering

Wennie Wang
Assistant Professor, Chemical Engineering

Daniel Wasserman
Professor, Electrical and Computer Engineering

Edward Yu
Professor, Electrical and Computer Engineering

Chin-Hao Chang’s research Scratch-resistant sapphire nanostructures with anti-glare, anti-fogging, and anti-dust properties published in Materials Horizons journal. This work demonstrates a novel transparent window made of sapphire nanostructures with anti-glare, anti-fogging, self-cleaning, and, most importantly, scratch-resistant properties. The new key concept is that by engineering the material composition and geometry of nanostructures, their material properties can be tailored in multiple physical domains. This work also provides the key insight that nanostructures can be as durable as smooth ceramic and scratch-resistant metal surfaces.

The SEM shows the sapphire nanostructures at peak nanoindentation load and the onset of fracture of the structures, but the crack is localized and does not propagate into the substrate.

An academic and industry research team led by Michael Cullinan is Holographic Metasurface Nano‑Lithography (HMNL), a 3D‑printing method that can create complex chip packages in a single step. Their work, supported by a $14.5 million DARPA award and a team of academic and industry partners, could dramatically speed up semiconductor manufacturing while reducing waste.

Linran Fan’s research focuses on nonlinear interactions between optical photons, superconducting circuits, electron spins, and acoustic waves at the quantum level in a hybrid system of novel integrated devices and materials. Target applications include photonic information processing, communication, and precision measurement enhanced by quantum information science.