On-chip inductor fabrication by Jean Anne Incorvia and Alex Hanson, featuring CoZrO films for advanced power applications. High Rate Deposition and Characterization of CoZrO Films for On-Chip Power Applications, Advanced Engineering Materials.
MRC supports a diverse community of researchers in electronics, optics, physics, chemistry, astronomy, and engineering disciplines, with users from both academia and industry.
The information below outlines the steps required to become a user and gain access to MRC facilities, including safety training, equipment training, and reservations.
For an overview of facility capabilities, watch this video.
Become a User
To become an MRC user, please complete and submit the project proposal form. You will receive a response in 24-48 hrs.
Download the Project Proposal Form (pdf)
Submit Proposal to MRC
Safety Training
New MRC users must complete Site-Specific Lab Safety Training before accessing the facility. During this training, users will learn about equipment training and reservations, as well as facility policies and procedures.
Cleanroom access is granted with a UT ID card after completion of the required safety training and quizzes.
Internal Users: Must be affiliated with an existing PI with an active account number.
External (Non-UT) Users: May access the facility after approval of a Service Agreement and background check, completion of HR onboarding (UT EID), required safety training, and issuance of a UT ID card for cleanroom access.
Equipment Training
After completing safety training, users may request equipment training. All equipment requires training before it can be reserved or used on an individual basis.
After submitting a training request, you will receive an email from UT Services confirming that a ServiceNow ticket has been created. Please use this email thread for all follow-up communication.
Training staff will contact you to schedule a session once your request has been received.
Equipment Reservation
All equipment must be reserved before use. Equipment can be reserved in the Facility Billing System (FBS).
UT EID is required for both internal (UT) and external (Non-UT) users. External users should have an EID provisioned during the Project Proposal and facility onboarding process.
Policies
IP
Facility users keep their Intellectual Property (IP). If needed, Industry users will be provided anonymity. Users are encouraged to share processes, where IP allows, to expand collective knowledge.
Acknowledgements
MRC users are asked to acknowledge the facility on publications. Use the following language as an example.
“This work was completed at the Texas Nanofabrication Facility Microelectronics Research Center.”