Research Core Facility Directory

The Cleanroom Nanofabrication Facility at UT Austin provides state-of-the-art resources for micro- and nanoscale device fabrication. Equipped with advanced tools for photolithography, etching, thin-film deposition, and metrology, the facility supports research in electronics, materials science, and biomedical engineering. Users have access to a controlled cleanroom environment for developing semiconductor devices, MEMS, and other nanoscale technologies. The facility offers training, technical support, and process consultation, enabling researchers to refine fabrication techniques and advance next-generation materials and devices.

Services Offered

• Nanofabrication and microfabrication tools
• Device prototyping and custom fabrication
• Lithography, etching, and thin-film deposition
• Electron beam lithography and nanoscale patterning
• Training and support in cleanroom protocols
• Advanced materials testing and characterization

The Texas Materials Institute Electron Microscopy Facility provides user access to the University of Texas at Austin community for state-of-the-art atomic scale characterization. Established in 2020, this new facility hosts advanced instruments for the analysis of materials and their preparation. This includes a low-voltage aberration corrected JEOL neoARM TEM that can operate from 30 – 200 kV, equipped with EDX and EELS, a Thermo Fisher Scios FIB:SEM, and several SEMs. Located in the ground floor (level 0) of the Engineering Education and Research (EER) Building. The facility consists of a suite of specially designed low-vibration rooms with precise temperature and humidity control. Operation of TEM is done remotely in a separate room to remove the impact of people on the room stability. An array of specialized holders and detectors are available for state of the art in-situ capabilities and imaging.

Services Offered

• High-resolution electron microscopy (SEM, TEM)
• Sample preparation for imaging and analysis
• Elemental and structural analysis
• Advanced imaging for biological and material sciences
• Training in electron microscopy techniques
• Consultation on microscopy experiment design and data interpretation

Services Offered

• Characterization of materials via spectroscopy
• Access to X-ray diffraction, Raman, and infrared spectroscopy
• Thermal and mechanical analysis of materials
• Consultation on material selection and characterization techniques