Category
Affiliations
Body
The Cleanroom Nanofabrication Facility at UT Austin provides state-of-the-art resources for micro- and nanoscale device fabrication. Equipped with advanced tools for photolithography, etching, thin-film deposition, and metrology, the facility supports research in electronics, materials science, and biomedical engineering. Users have access to a controlled cleanroom environment for developing semiconductor devices, MEMS, and other nanoscale technologies. The facility offers training, technical support, and process consultation, enabling researchers to refine fabrication techniques and advance next-generation materials and devices.
Services Offered
- Nanofabrication and microfabrication tools
- Device prototyping and custom fabrication
- Lithography, etching, and thin-film deposition
- Electron beam lithography and nanoscale patterning
- Training and support in cleanroom protocols
- Advanced materials testing and characterization
Brief Description
Nanofabrication services, Cleanroom access, Micro- and nano-scale device fabrication, Process development