Features:
- Circular Vacuum Ovens from T-M Vacuum Products, Inc.
- Vacuum bake out and curing ovens capable of attaining temperatures up to 600C.
- Standard pumping packages available from rough vacuum to ultra-high vacuum capabilities.
- Touch screen PLC control systems and data logging capability.
Compatible Materials: Si, metals III-V,
Incompatible Materials: Organics, Polymers (photoresist)
