Spin Rinse Dryer Verteq 1 & 2 (No Photoresist, No Metal)

Verteq Spin Rinser Dryer, Piranha Clean Required

Compatible Materials: Si / SiGe Full wafer - no pieces

Incompatible Materials: Metals Photoresist

Operation Procedures:

1. Log on to the tool using the LabAccess terminal. 
2. Log off of the tool using the LabAccess terminal.