Spectrophotometer - Nanospec Reflectometer AFT

Nanospec Microscope

Operation Procedures:

1. Log on the tool using LabAccess Terminal
2. Log into Nanospec/AFT:
   1. Username: nano
   2. Password: 4000
3. Select [AUTO] or [F3]
4. OPTION: "Do You Want to Save Measurements In Database" [Yes/No], Select [No]
5. Select a Recipe from "COOKBOOK SELECTION;" Scroll through and select a recipe from the "AVAILABLE RECIPE" list
6. REMINDER: Take a New Reference? Age of Reference [Yes/No], select appropriate: normally select [No]
7. Load wafer on the stage and select lens. Use the positioning pegs if necessary
8. Find specified target area and adjust focus. Bring aperture into focus using focus knobs
9. REMINDER: "Is Cassette/Wafer Ready", press OK to continue [OK] / [EXIT] select [OK]
10. Take and record measurements
11. REMINDER: Do you want to continue for another wafer [YES]/[NO], select appropriate
12. To take individual/additional measurements:
    1. Select [MEAS] [F10]
    2. PMCAMERA2 (Screen Capture)
    3. Open PMCAMERA2 from desktop prior to taking measurements
    4. Specify a:\ for floppy
    5. Make sure “Full Screen” is selected
    6. Select [Options] [Save Options]
    7. Log into Nanospec AFT
    8. When Graph/Results are on screen, press [CTRL] [ESC]
    9. Select PMCAMERA from list
    10. Move PMCAMERA to bottom of window
    11. Select [GRAB] – [GRAB]
    12. NOTE: Each Capture takes Aprox. 300kb. You DO NOT receive a notice when floppy is full.
    13. Press [CTRL] [ESC] when capture is complete
    14. Select Nanospec From List To Return to Measuring
13. Log off of the tool using the LabAccess terminal.