SEM Scheduling
Tool usage and reservation usage are monitored to prevent overbooking and to keep access fair. Please help maintain a community approach by "booking what you need and using what you book."
- Each user is allowed to have a maximum of two (2) reservations at any time.
- Maximum reservation duration shall be two (2) hours for METROLOGY work.
- Each group (UT lab group, company, etc.) shall have a maximum of three (3) reservations per day during the period 8:00AM to 8:00PM.
- Maximum lead time for reservations is 48 hours.
- The tool may be used when not reserved, if duration of work will not interfere with the next reserved time.
- This use of unreserved time shall not count toward the user or the group’s maximum number of slots.
- Users cannot share or borrow other users’ reservation slots.
- Users are logged onto the tool for the complete duration of tool use.
- This includes load, pump-down, scan image, and all other facets of tool use.
- When the tool is not logged on the lab access system, it will be considered not in use and may be utilized by any other user if this use does not interfere with the next reserved time.
- Users are required to enter complete information into the tool log book [KLA3] [RP4] each time they use the tool.
Zeiss SEM Training Video: https://www.youtube.com/watch?v=P92wk0rM3Jo
