CHA#2 E-beam Evaporator Ion Assisted

Ar, O2

Compatible Materials: Metal/dielectric with vapor pressure higher than 10-6 Torr at 1000°C: Hf, Ir, Mo, Ni, Si, Pt, Ta, Ti, W

Incompatible Materials: All Metals with a vapor pressure lower then 10^6 Torr

Operation Procedures:

1. Log on to the tool using the LabAccess terminal.
2. Read PDF instructions.
3. Log off of the tool using the LabAccess terminal.