CHA#1 E-beam Evaporator

Features:

• 4 pockets for 25cc crucible
• 10-6 Torr base pressure (cryo pumped)
• crystal thickness monitor

Compatible Materials: Si / SiGe / III-V

Incompatible Materials: N/A

Operation Procedures:

1. Log on to the tool using the LabAccess terminal.
2. Read PDF instructions.
3. Log off of the tool using the LabAccess terminal.