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Microelectronics Research Center
Equipment
Asher (Microwave) 300 PVA Tepla

Asher (Microwave) 300 PVA Tepla

Compatible Materials: Si / SiGe

Incompatible Materials: III-V

Location

MER 1.72

Category

Photolithography

Asher (Microwave) 300 PVA Tepla

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