Properties: Mask holder 5 inches, Wafer size 2 to 4 inches and pieces. Illumination Wavelength 265nm.
Exposure Modes: soft contact, hard contact, Vaccum contact , Proximity
Compatible Materials: No Restrictions
Operation Procedures:
- Log on the system via Lab Access.
- Make sure that the power is 500W, the UV light is on.
- Start the EV620.exe program.
- Log on.
- Open recipe 1 (for top alignment) or recipe 2 (for bottom alignment). Check the parameter and run.
- Follow the steps by steps procedure given by the software
- Exit the program when done. Log off from lab access.
- The system should stay on (power, light).
